Production of halogen fluorides and organohalogen fluorides, useful as etchants, comprises reaction of an oxygen compound of the halogen or organohalogen compound with hydrogen fluoride or hydrofluoric acid in a non-water miscible solvent

摘要

A process for the production of halogen fluorides and organohalogen fluorides comprises reaction of an oxygen compound of the halogen or a multivalent organohalogen compound with hydrogen fluoride or hydrofluoric acid in the presence of an inert solvent that is not miscible with water.