Device for suppressing partial emission of a radiation source based on a hot plasma, especially an EUV radiation source, has a debris filter with plates radially aligned with the optical axis of a radiation source

摘要

Device for suppressing partial emission of a radiation source based on a hot plasma, especially an EUV radiation source, has a debris filter (1) with plates (11) radially aligned with the optical axis (2) of a radiation source. The plates have a pair of parallel edges and are arranged orthogonal between an inner and an outer sleeve surface. The sleeve surfaces are tensioned by the parallel edges of the plates and are arranged in a rotational symmetrical manner to the optical axis so that a plasma for a spatial angle by a plates bundle.