Production of a deformation sensor used in common rail diesel engines and in fuel injection engines comprises applying a sacrificial layer on or in a substrate, applying an activated layer on the sacrificial layer and further processing

摘要

Production of a deformation sensor comprises applying a sacrificial layer on or in a substrate, applying an activated layer (10) on the sacrificial layer and arranging sensitive regions (12) and electrical structures (13, 14) on or in the activated layer. A peripheral trench (11) is produced around the region of a sensor element (15) with the sensitive region and electrical structures. The trench is interrupted by connecting sites (25) which connect the region of the sensor element with part of the activated layer lying outside of the trench. The sacrificial layer is removed below the region of the sensor element.