Method and apparatus for determining the distance between a reference plane and an inner or outer optical interface of an object and use thereof for determining a surface profile of a, in particular metallic, object, autofocus - module, a microscope and method for auto focus of a microscope

摘要

A method for determining the distance between a reference plane and an inner or outer optical interface of an object, which comprises the steps of: generating a collimated light beam, coupling of the collimated light beam in an optical system which, as in the case of a microscope of an objective lens and a tube lens is made up, in such a way that the collimated light beam falls obliquely onto the tube lens, detecting the position of the of a first inner or outer optical interface of an object reflected light beam emerging from the tube lens and generating a the position of the present invention to provide a first signal, and determining the distance between a reference plane and the first boundary surface in magnitude and direction, on the basis of the first signal, a device for carrying out the same and use thereof for determining a surface profile of a, in particular metallic, object, autofocus - module, a microscope and method for auto focus of a microscope.