Autofocus device for focusing microscope on e.g. substrate surface in adjustable distance, has control unit that evaluates and controls brightness and sharpness of microscope with respect to distance between microscope and observed object

摘要

The autofocus device has a control unit (4) that regulates a positioning platen (3) and the lighting unit (2.2) and camera (2.3) of a microscope (2) with respect to the object (1) being observed. The microscope also has an objective lens (2.1) facing the object. The control unit also evaluates and controls the brightness and sharpness of the microscope with respect to the distance between the microscope and observed object.