Structured silicon body with directed thermal conductivity properties for sensor insulation, is made porous with selected crystal orientation

摘要

Largely-crystalline silicon is made porous starting from an edge (15) of a region (11). The orientation differs from -100- orientation, or from an equivalent crystal orientation based on symmetry. An Independent claim is also included for a corresponding method in which thermal conductivity is orientated selectively, through introduction of porosity into an orientated crystalline body.