A process for the finesse compensation in a fabry - perot - component as well as fabry - perot - component with a high finesse

摘要

The invention discloses a process for the finesse compensation in the case of a fabry - perot - component with a first and a second reflector, which are parallel. The method includes the steps of: orthogonal arrangement of a plurality of first actuating elements on the circumference of the first reflector; electrical connection of the first adjusting element with a plurality of independent drive voltages, and control of the independent drive voltages for driving the first adjusting elements, with a subsequent operation of the first reflector for the tilting relative to the second reflector having two rotational degrees of freedom.