Microstructure creation method for generating an area-by-area microstructure e.g. for infrared sensor elements, using a functional material to create it on an unsupported area of a membrane or on a coating

摘要

Applied to a base body (BB) (9), a masking layer/coating (11) with a recess area by area to reach the BB regarding its depth forms by approximation a negative structure for a microstructure (18) to be generated. The recess partly fills with viscous liquid output material consolidated into a functional material (10) to absorb heat/electromagnetic radiation. Finally, the masking layer is removed.