Turbo molecular pump has stator discs spaced out by oversized distance rings separated at a point with separating line at inclined angle to press rings against inside wall of housing during assembly

摘要

The pump has rotor and stator discs arranged alternately in succession in a cylindrical housing (1). The stator discs are spaced out by distance rings (14) which are oversized and separated at a point (16) with the separating line running at an angle inclined to the axial direction so that during assembly the rings are spread out through axial pressure to press against the inside wall (15) of the housing.