Stator disk for turbo-molecular pump, has plate at outer ring side, so that plate fulfills spacer ring function, and support ring connected with plate, where plate is turned away from plane, and side is turned outwards in radial direction

摘要

The disk has a plate (4) at a side of an outer ring (3), such that the plate fulfills the function of a spacer ring, where the plate is turned away from a disk plane, and the side is turned outwards in a radial direction. A support ring (5) is connected with the plate, and forms a part of a cylinder, which has an axis that is perpendicular to the disk plane. The support ring has a component with U-shaped cross-section, and a part of the plate is arranged within U of the U-shaped cross-section. An independent claim is also included for a method for manufacturing a stator disk for a turbo-molecular pump.