Multi-mode metal ion source, e.g. for workpiece treatment, has magnetic mirror field generator, cooled anodes arranged between cathodes, cooled anti-cathode, sputtering and extraction electrodes and a switching device

摘要

Multi-mode metal ion source comprises a unit for producing a symmetrical magnetic mirror field in an air gap of an electromagnet, an electrode arrangement arranged in the region of the mirror field, two cooled anodes (2) arranged between cathodes (1), a hollow cylindrical cooled anti-cathode (6) arranged between the anodes, further sputtering electrodes (4), an extraction electrode (7), and a switching device. Preferably the unit for producing a magnetic mirror is structured so that the cross-section of the pole shoe producing the mirror field is rectangular to elliptical. The iron core of the unit for producing the magnetic mirror consists of a carbon core or two carbon cores forming a mirror. A dielectric is arranged between the pole shoes and the electrode arrangement.