Apparatus for generating cold plasma, e.g. for thermochemical treatments, comprises cathode body with plasma confinement chambers, magnetic field sources and cooling fluid circulating element

摘要

In apparatus for generating cold plasma in an evacuated vessel using a cathode body (1) with hollow plasma confinement chambers (1a), each chamber is associated with a magnetic field source (2) causing electrons to rotate around its lines of force. The cathode body is provided with a cooling fluid circulating element (3) to extract heat generated by the intense ionic bombardment in each of the hollow chambers.