Determining chromatic aberration in scanning microscope, by determining scan position at which detected light has power extremes, for multiple detection wavelengths

摘要

The method involves scanning a sample having reference structures using an illumination light beam, and detecting the light leaving the sample in dependence on the scan position at a detection wavelength or in a spectral range. The scan position is determined at which the detected light has power extremes. The light leaving the sample is detected at a further wavelength or spectral range, and further scan positions of power extremes are determined. The chromatic aberration is determined from the scan positions. An independent claim is included for a scanning microscope.