Binary blazed diffracting optical element and objective containing this has diffracting structures of varied and controlled distances with respect to the radiation wavelength

摘要

A binary blazed diffracting optical element (1) comprises only one row of individual sub-structures (2) having a closed geometric surface in plan whose measurement parallel to the extending direction varies and whose measurement perpendicular to this has a maximum greater than the radiation wavelength. An Independent claim is also included for a microlithographic projection objective comprising the above.