Gas sensor with membrane, sensitive layer, heater and evaluation structures, includes second evaluation structure and functional layer on membrane

摘要

A second evaluation structure (16) is provided on a membrane (10). A functional layer (30) is provided. A gas sensor comprises a sensitive layer (20) including a first region (41) in which the sensitive layer is immediately next to the gas (40) to be detected. The sensitive layer has a second region (42), in which only the functional layer (30) directly adjoins the sensed gas. A second evaluation structure (16) is located in the first region of the sensitive layer. A first evaluation structure (14) is located in the second region of the sensitive layer. The functional layer (30) is on the sensitive layer. The sensitive- and functional layers have a circular border and are concentric. The gas sensor is micro-structured.