Gas-tight disc slider for controlling high purity polysilicon granule flow stream from turbulence layer reactor with slider plate and valve seat provided with silicon or quartz glass surface

摘要

The disc slider has a housing (3) fitted between an entry pipeline (1) and an exit pipeline (2), containing a valve seat (5) provided by 2 sealing discs (4a,4b) and a relatively displaced closure element in the form of a slider plate (6), acted by an operating element (7). The slider plate and the valve seat have a silicon or quartz glass surface.