Beam scanning and image formation from e.g. solar cell sample under analysis, employs line-projecting scanning beam passed repeatedly over sample at different angles

摘要

For scanning, a beam projecting a line-shaped area onto the sample is used. This is repeatedly passed over the sample at various angles. Stored measured values at each angular position, form a data vector. From this, using known mathematical principles related to laminography, the two-dimensional image is reconstructed. A video projector (4) produces the line-shaped beam illumination. It is produced by rapid back and forth scanning of a beam producing a light spot. In addition to the analytic measured values, the reflected beam intensity from the sample is measured and correspondingly evaluated.