Correcting method for adjusting distortion in an extra-axial field area on a projecting lens' image plane scans a pattern in a reticle onto a carrier for a light-sensitive coating

摘要

A sledge holds a wafer (14). A base plate (36) has walls (38) at its ends for two parallel side guide rods (40), parallel between which a threaded spindle (42) extends, driven by a geared motor (44) on one of the walls. A guide sledge (50) runs on the guide rods with four guide lugs (46) next to the corners of the base plate. Independent claims are also included for the following: (a) A micro-structured component; (b) and for a projecting lens for a micro-lithographic projection exposure facility with a manipulator.