Projection lens for imaging projection lens pattern from object plane into image plane, has field point in field plane of outgoing beam illuminating manipulator surface with sub-aperture, and manipulation system comprising manipulator

摘要

The lens (PO) has multiple optical elements with optical surfaces arranged in a projection optical path between an object plane (OS) and an image plane (IS). A wave front manipulation system comprises a manipulator (MAN1) with a manipulator surface (MS1) arranged in the projection optical path, and a positioning device (DR1) is adapted for reversible change of surface shape and/or index of refraction distribution of the manipulator surface. A field point in a field plane of an outgoing beam illuminates the manipulator surface with a sub-aperture. Independent claims are also included for the following: (1) a projection exposure method (2) a projection exposure system.