Quadrupole measuring device, for measurements at a probe surface under ultra-high vacuum conditions, has moveable electrode carrier supporting four convex electrodes, which is driven by single piezo-actuator

摘要

A moveable electrode carrier (2) holds four measurement electrodes (1) in parallel. The electrode carrier can be moved over the probe surface using a single piezo-actuator (5). The four electrodes are convex in shape and have essentially the same radius of curvature, such that they come into contact with the probe at the same time. The probe is cooled by a cryostat (6) to between 6.6K and 77K.