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device for the production of high-performance mikrowellenplasmen
device for the production of high-performance mikrowellenplasmen
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机译:高性能微孔内质酶生产装置
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摘要
In a device for the production of powerful microwave plasmas, the resonator is designed as a coaxial resonator with inner and outer conductors. The microwaves are coupled into the plasma chamber via the boundaries of the coaxial resonator.
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