REQUIREMENTS FOR THE TRANSPORT OF CROSS-BORDER SUBSTANCES FROM ONE TRANSPORT STATION OVER MORE INTERSTATIONS TO ONE END STATION

摘要

The invention relates to a device for transporting circular disk-shaped substrates (1, 1',...) from a feeding station (5) to an end station via several intermediate stations (10, 11, 12, 13), by means of a first revolving table (3) with substrate grippers (4, 4',...) and at least one second revolving table. Said second revolving table is provided with pick-up spindles (8, 8',..., 9) and serves as the end station. The first revolving table (3) performs an oscillating revolving movement about its axis of revolution (15), this movement being adapted to the machining cycle, picking up the substrates (1, 1',...), transporting them and releasing them. The revolving table (3) is also provided with a transport mechanism (6) which can move in a radial direction. The lifting movement of said transport mechanism enables the substrate (1, 1',...) to be transported to a substrate pick-up spindle (9) in the centre of the second revolving table (7).