Cavity resonator for the reduction of the phase noise of a voltage-controlled oscillator and a method for its production

摘要

PURPOSE: A cavity resonator for reducing a phase noise of a voltage control oscillator and a manufacturing method thereof are provided to reduce a phase noise of a voltage control oscillator by using a cavity with a fine processing of a silicone and a micro electro mechanical system instead of a metal cavity and by combining a microstrip line and a cavity for using in a voltage control oscillator of a reflection type. CONSTITUTION: A cavity resonator for reducing the phase noise of a voltage control oscillator includes a cavity(10, 20), a microstrip line(30), a pole , an isolation slot and a resistance thin film. The cavity is made by processing a semiconductor into a rectangular parallelepiped type and the pole couples the edge of microstrip line and the lower thin film of the cavity and the isolation slot is made by removing the part as a fixed width, which contacts with a pole of higher thin film and the resistance thin film is made for impedance matching around the lower thin film of the cavity which contacts with the pole. Thereby the phase noises of the voltage control oscillator are reduced.