A process for the preparation of a liquid from joint head, so produced liquid from joint head, and a process for the preparation of a tiny mechanical device

摘要

A method of manufacturing a liquid discharge head having a discharge opening, a wall member , a substrate, and a movable member, the movable member. The method has the steps of preparing the substrate provided with the movable member, filling the gap between the movable member and the substrate with liquid photo-curing resin, and applying the resin to the substrate by spin coating until it covers the movable member with rotated resining technic, exposing that area of the photo-curing resin which excludes an area including at least the liquid flow path to light to thereby harden a portion corresponding to the wall member, and removing the unexposed portion of the photo-curing resin to thereby form the movable member in the liquid flow path.