A process for the preparation of a liquid from joint head, produced with liquid from joint head, head cassette, liquid from joint device, method for producing a silicon plate and silicon plate is produced thereby

摘要

The invention provides a method for producing a liquid discharge head including a head main body (7) provided with plural energy generation elements (12) for generating energy for discharging liquid as a flying liquid droplet and plural flow paths (1) in which the energy generation elements are respectively provided, and an orifice plate (16) provided with plural discharge ports (3) respectively communicating with the flow paths, wherein the orifice plate and the head main body are mutually adjoined, the method comprising a step of preparing a substrate consisting of a silicon-containing material for preparing the orifice plate a step of forming, by dry etching, plural recesses (58) in positions on the surface of the substrate respectively corresponding to the discharge ports, with a depth larger by 5 to 50 µm than the depth of the discharge ports, a step of thinning the substrate from the reverse side thereof until the depth of the recesses becomes equal to the depth of the discharge apertures to form plural discharge ports on the substrate, thereby preparing the orifice plate constructed by forming the plural discharge ports in the substrate, and a step of adjoining the orifice plate to the head main body.