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PRICE VALUES OF PRESSURE PRESSURES WITH HIGH MILITARY SERVICE AND HIGH HEALTH

机译:军队高卫生高压力价的价格

摘要

A high average power, high brightness solid state laser system. We first produce a seed laser beam with a short pulse duration. A laser amplifier (24) amplifies the seed beam to produce an amplified pulse laser beam which is tightly focused to produce pulses with brightness levels in excess of 1011 Watts/cm2. Preferred embodiments produce an amplified pulse laser beam having an average power in the range of 1 kW, an average pulse frequency of 12,000 pulses per second with pulses having brightness levels in excess of 1014 Watts/cm2 at a 20 micrometers diameter spot which may be steered rapidly to simulate a larger spot size. Alternately, a kHz system with several (for example, seven) beams (from amplifiers arranged in parallel) can each be focused to 20 micrometers and clustered to create effective spot sizes of 100 to 200 micrometers. These beams are useful in producing X-ray sources for lithography.
机译:高平均功率,高亮度固态激光器系统。我们首先产生具有短脉冲持续时间的种子激光束。激光放大器(24)放大种子光束以产生放大的脉冲激光束,其被紧密聚焦以产生亮度水平超过10 11瓦/ cm 2的脉冲。优选的实施方式产生一种放大的脉冲激光束,其平均功率在1kW的范围内,平均脉冲频率为每秒12,000个脉冲,其中脉冲在20微米下的亮度水平超过10 14瓦/ cm 2。直径的光斑,可以快速转向以模拟更大的光斑尺寸。或者,一个具有数个(例如,七个)光束(来自并行排列的放大器)的kHz系统可以分别聚焦到20微米,并聚在一起以产生100到200微米的有效光斑尺寸。这些光束可用于产生用于光刻的X射线源。

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