PROJECTING AND RECESSED PATTERN FORMING METHOD AND PROJECTING AND RECESSED PATTERN FORMING MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a method of forming a projecting and recessed pattern without generation of dust even on a large-area and stepped base plate.;SOLUTION: This projecting and recessed pattern forming method includes: a process of stacking a sheet-like base material having a particle layer on one principal plane on the base plate with the principal plane side having the particle layer brought into contact therewith; a process of removing the sheet-like base material from the base plate so that the particle layer is left on the base plate; and a process of etching the surface of the base plate taking the fine particle layer as an etching mask to form a fine projecting and recessed pattern on the surface of the base plate. The pattern forming member is used in the above method.;COPYRIGHT: (C)2006,JPO&NCIPI