首页> 外国专利> QUARTZ CRUCIBLE CONVEYING TOOL, QUARTZ CRUCIBLE CONVEYING APPARATUS, AND QUARTZ CRUCIBLE CONVEYING METHOD

QUARTZ CRUCIBLE CONVEYING TOOL, QUARTZ CRUCIBLE CONVEYING APPARATUS, AND QUARTZ CRUCIBLE CONVEYING METHOD

机译:石英坩埚输送工具,石英坩埚输送装置和石英坩埚输送方法

摘要

PROBLEM TO BE SOLVED: To provide a quartz crucible conveying tool with which polycrystalline silicon as a raw material can be easily and quickly exchanged, to provide a quartz crucible conveying apparatus, and to provide a quartz crucible conveying method.;SOLUTION: The quartz crucible conveying tool 1 is the one capable of being freely attached to or detached from the opening 11a of a quartz crucible 11 and is composed of a platy base 3 which covers the opening 11a, an annular fit part 4 attached to the lower surface 3a of the base 3, fitted around the opening 11a, and made of an elastic material, and a vent port 5 which is situated in the region within the annular fit part 4 and penetrates the upper and lower surfaces 3b and 3a of the base 3.;COPYRIGHT: (C)2006,JPO&NCIPI
机译:解决的问题:提供一种石英坩埚输送工具,利用该石英坩埚输送工具可以容易且快速地交换作为原料的多晶硅,提供一种石英坩埚输送设备,并提供一种石英坩埚输送方法。输送工具1是能够自由地安装在石英坩埚11的开口11a上或从其拆卸的工具,由覆盖开口11a的板状基体3,安装在该坩埚11的下表面3a上的环状的嵌合部4构成。围绕开口11a并由弹性材料制成的基座3和位于环形配合部分4内的区域中并穿过基座3的上表面3b和下表面3a的排气口5。 :(C)2006,日本特许厅

著录项

  • 公开/公告号JP2005281028A

    专利类型

  • 公开/公告日2005-10-13

    原文格式PDF

  • 申请/专利权人 SUMCO CORP;

    申请/专利号JP20040094619

  • 发明设计人 MUNEZANE KENJI;

    申请日2004-03-29

  • 分类号C30B29/06;C30B15/00;

  • 国家 JP

  • 入库时间 2022-08-21 22:37:44

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