REFLECTION TYPE NEAR-FIELD LIGHT DETECTION OPTICAL SYSTEM AND REFLECTION TYPE NEAR-FIELD OPTICAL MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a reflection type near-field light detection optical system and a reflection type near-field optical microscope capable of detecting with high sensitivity a fine change of reflected light intensity, polarization, a phase or the like caused by an observation object, while keeping high resolution and heightening the sensitivity.;SOLUTION: This microscope is equipped with this reflection type near-field light detection optical system 80 comprising a laser light source 30 for emitting measuring laser light Lin; an optical aperture probe 20 for generating near-field light and allowing the light to enter the surface of an observation object 90, guiding from an optical aperture 22 reflected light LR2 from the observation object 90, and emitting through a rear end side aperture 21 detection light LRout including an interference component of the reflected light LR2 from the observation object 90 guided from the optical aperture 22; a solid vibrator 60 for changing periodically the relative distance between the tip of the optical aperture probe 20 and the observation object 90; and a lock-in amplifier 50 for detecting the interference component of each reflecting film included in the detection light LRout synchronized with a changing period of the relative distance between the tip of the optical aperture probe 20 and the observation object 90 given from the solid vibrator 60.;COPYRIGHT: (C)2006,JPO&NCIPI