PROBLEM TO BE SOLVED: To realize high image quality, high durability, high stability, etc., by measuring electrostatic latent image on a photoreceptor, within a short time after the formation of a latent image in an electrophotographic system, and by providing feedback on design, the quality for each process is improved.;SOLUTION: An electron beam B generated from an electron gun 1 is converged by an electronic condenser lens 2, via a scanning lens 4 and an objective lens 5, and scans the inside of the charged area of a sample 6. The sample 6 is charged to a predetermined potential according to a relation between a back potential Vg applied to a conductor 7 and an acceleration voltage. A light beam L, emitted from a light source 10 such as an LD, is emitted to the sample 6 via a collimating lens 11, a cylinder lens 13, etc., and forms an electrostatic latent image on the sample 6. By stopping light emission, changing the conditions again, and scanning with an electron beam, an output corresponding to a latent image can be obtained in a charge detector.;COPYRIGHT: (C)2006,JPO&NCIPI
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