OZONE THERMAL DECOMPOSITION METHOD AND OZONE THERMAL DECOMPOSITION APPARATUS

摘要

PPROBLEM TO BE SOLVED: To provide an ozone thermal decomposition method and an ozone thermal decomposition apparatus which can reduce a consumption energy required for the ozone thermal decomposition of ozone-containing gas. PSOLUTION: The apparatus is provided with: a heating part 3 communicated with an inlet 7 for the ozone-containing gas; a heater 11 which heats the heating part 3 to a constant temperature in the range of 100C to 350C; a packed part 4 which is communicated with the heating part 3, is communicated with an outlet 8 for ozone-removed gas and is packed with either of particulate silica gel, zeolite, porous glass, porous ceramic and porous metal crystallite; and a temperature holding heater 12 which holds the packed part 4 at a constant temperature in the range of 100C to 350C. The ozone-containing gas continuously injected into the heating part 3 from the inlet 7 for the ozone-containing gas is heated and is allowed to pass through the packed part 4, and thereby ozone thermal decomposition is performed and ozone-removed gas is discharged from the outlet 8 for ozone-removed gas. PCOPYRIGHT: (C)2005,JPO&NCIPI