ENERGY FILTER AND ELECTRON MICROSCOPE AND SLIT TRAVELLING MECHANISM

摘要

PROBLEM TO BE SOLVED: To provide an energy filter with a filter of a simple structure which does not deflect electron beam for slit selection.;SOLUTION: Movement of a slit holder 35 in a y-axis direction is carried out by rotating a Y-motion lever 47 around a shaft 39. Rotation of a holder 33 is carried out by rotating a rotation lever 38 around the shaft 39. Movement of the holder 33 in an x-axis direction is carried out by moving a shaft 29b connected to an actuator 29a in the x-axis direction and moving a base 23 in the x-direction.;COPYRIGHT: (C)2006,JPO&NCIPI