SLIT-NOZZLE COATING TYPE COATING DEVICE AND SLIT-NOZZLE COATING TYPE COATING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a slit-nozzle coating type coating device that inhibits the drying of a liquid to prevent the coating failure and that is capable of applying a liquid on a substrate in uniform thickness and of reducing a cost by preventing the useless consumption of a liquid, and to provide a slit-nozzle coating type coating method.;SOLUTION: The slit-nozzle coating type coating device 10 discharges the liquid 2 from a storing means 50 which retains the liquid 2 through a slit-like nozzle opening 41 installed at a coating head 40 to a coated face 1a of the surface of the substrate 1 and applies the liquid 2 on the substrate 1 by relatively transferring the substrate 1 and the coating head 40 to the face direction. The storing means 50, which retains the liquid 2 at the sealed area 52 sealed together with a gas, is provided with a liquid level detection means 54 that detects the height of the liquid level 2a of the liquid 2 retained inside the storing means 50, and a control part 60 that continuously controls the flow rate of the liquid 2 discharged from the nozzle opening 41 by relatively varying the height of liquid face 2a which is retained inside the storing means 50 detected by the liquid face detection means 54 and the height of the end of the nozzle opening 41 while applying the flow rate of the liquid 2 discharged from the nozzle opening 41.;COPYRIGHT: (C)2005,JPO&NCIPI