WIDE-ANGLE SINGLE-POINT MEASUREMENT METHOD OF THERMAL DIFFUSIVITY COEFFICIENT BY GENERAL-PURPOSE NANOSCALE INSTRUMENTATION TECHNOLOGIES

摘要

PROBLEM TO BE SOLVED: To provide a wide-angle single-point measurement method of a thermal diffusivity coefficient, by a general-purpose nanoscale instrumentation technologies for measuring the thermal diffusivity coefficient of a bulk body or a membrane in nanoscale.;SOLUTION: In a transient grating method, by which the thermal damping time of a membrane material mounted on a substrate is measured and by which the thermal diffusivity coefficient is determined by using the thermal damping time, pumping-pulsed light, having a wavelength of 800 nm, is made to enter at a cross angle which is a wide angle of at least not less than 29 degrees, in order to provide high spatial resolutions, with respect to thermal gratings generated in the membrane material; and only one transient grating signal profile, which is obtained by measuring transient changes in the thermal gratings, is subjected to a data-analyzing processing, by using a fitting function represented by the equation {S(t)=S₀+B×exp(-3t/τ)}, thereby rapidly and accurately determining the thermal dumping time and the correct thermal diffusivity coefficient of the membrane material, through carrying out the operations more safely and easily.;COPYRIGHT: (C)2005,JPO&NCIPI