MANUFACTURING METHOD FOR CYLINDER LENS, GRAY SCALE MASK, MANUFACTURING METHOD FOR INTEGRATOR, INTEGRATOR, ILLUMINATION OPTICAL SYSTEM AND PROJECTION ALIGNER

摘要

PROBLEM TO BE SOLVED: To manufacture a cylinder lens or a cylinder lens array with high profile irregularity.;SOLUTION: An exposure stage where a gray scale mask (20) modulated in terms of transmittance in accordance with the unit cylindrical surface shape of the cylinder lens array or the cylinder lens is set as an exposure mask and lens base material (10") coated with resist is successively moved and exposed with the image (I) of the gray scale mask in the generatrix direction of the cylindrical surface, a developing stage where the resist of the lens base material which has been exposed is developed, and an etching stage where the lens base material is etched with the resist remaining after developing as an etching mask are performed in the manufacturing method for the cylinder lens. By setting the moving step of such successive moving exposure smaller than the width (Lx) of the image, the level difference of exposure on a shot boundary is made small. Therefore, the profile irregularity of the completed cylinder lens is enhanced.;COPYRIGHT: (C)2005,JPO&NCIPI