SiO2 POWDER OF SINTERED COMPACT TARGET FOR OPTICAL RECORDING MEDIUM PROTECTIVE FILM FORMING, MANUFACTURING METHOD OF SINTERED COMPACT TARGET USING THE POWDER AND SINTERED COMPACT TARGET

摘要

PROBLEM TO BE SOLVED: To provide an SiO₂ powder of a sintered compact target for forming an optical recording medium protective film that suppresses the generation of static electricity and that is hard to aggregate and is easy to disperse.;SOLUTION: The method is to improve the SiO₂ powder for manufacturing the sintered compact target for forming the optical recording medium protective film by dispersing an SiO₂ powder in a ZnS matrix. The structure is characterized by applying the antistatic treatment on the part or the whole of the surface. The average particle size of the SiO₂ powder is 0.001-5μm. The sintered compact target for forming the recording medium protective film can be manufactured by mixing 1-50 mol% of the SiO₂ powder raw material containing the SiO₂ powder with 99-50 mol% of the ZnS powder raw material with the purity of 99.99 wt.% or more, charging the mixed powder in the hot-press mold and hot-pressing the same at a temperature of 700-1,200°C at pressure of 20-40 MPa in a vacuum or Ar gas atmosphere.;COPYRIGHT: (C)2005,JPO&NCIPI