PIEZOELECTRIC FILM, PIEZOELECTRIC ELEMENT, PIEZOELECTRIC ACTUATOR, PIEZOELECTRIC PUMP, INK-JET RECORDING HEAD, INK-JET PRINTER, SURFACE ACOUSTIC WAVE ELEMENT, THIN FILM PIEZOELECTRIC RESONATOR, FREQUENCY FILTER, OSCILLATOR, ELECTRONIC CIRCUIT, AND ELECTRONIC APPARATUS

摘要

PPROBLEM TO BE SOLVED: To provide a piezoelectric film having good piezoelectric characteristics. PSOLUTION: The piezoelectric film 5 is expressed by the general formula of PbSB1-b/SB[((XSB1/3/SBNbSB2/3/SB)SB1-c/SBB'SBc/SB)SB1-a/SBYSBa/SB]OSB3/SB. In the formula, X is composed of at least one of Mg, Zn, and Ni, the B' is composed of at least one of Zr, Ti, and Hf, and Y is composed of at least one of V, Nb, Ta, Cr, Mo, and W. In the addition, a is adjusted to 0.05a0.30, and b is adjusted to 0.025b0.15, and c is adjusted to 0.25c0.035 when X is Mg, 0.30c0.40 when X is Ni, and 0.05c0.15 when X is Zn. PCOPYRIGHT: (C)2005,JPO&NCIPI