MANUFACTURING METHOD OF NI-ZN FERRITE THIN FILM

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a ferrite thin film which can form a thin film of a desired thickness efficiently by a simple device without sacrificing the good soft magnetism of ferrite, thereby greatly improve reduction in the size and weight of an electronic apparatus.;SOLUTION: The manufacturing method of the ferrite thin film adopts Spray Pyrolysis Deposition in which a raw mixture solution containing a nitride of metal composing ferrite is sprayed intermittently from a discharge nozzle to a heated substrate using a carrier gas. The temperature of a substrate is 300-500 °C, preferably, 350-450 °C. The nitride of the metal is comprised of Fe(NO₃)₃, Zn(NO₃)₂, and Ni(NO₃)₂. The nitride of the metal is blended so that an ion concentration ratio a:b:c of (Fe)₂, Zn and Ni in the ferrite thin film is 0.30≤a≤0.70, 0.14≤b≤0.45, 0.08≤c≤0.38 (where a+b+c=1). The mixture solution is sprayed intermittently from the discharge nozzle by using compressed air as the carrier gas.;COPYRIGHT: (C)2005,JPO&NCIPI