MEASURING INSTRUMENT FOR TRACE OF COMPONENT IN GAS AND MEASURING METHOD USING IT

摘要

PROBLEM TO BE SOLVED: To provide a simple and rapid measuring instrument of a trace of a component in gas, and a measuring method using it.;SOLUTION: This measuring instrument of a trace of the component in the gas is equipped with a vacuum cell 12 provided with a vacuum pump 11, a sample introducing pipe 14 for introducing an exhaust gas 13 into the vacuum cell 12, a plasma forming device 15 for forming the plasma of a trace of the component in the exhaust gas 13 supplied into the vacuum cell 12 and a photodetector 17 for detecting the peripheral region of the plasma light 16 emitted from the component. Detection light L is measured in the measuring part 28 of the peripheral region of the plasma light 16.;COPYRIGHT: (C)2005,JPO&NCIPI