ON-THE-SPOT MEASURING UNIT FOR LASER BEAM MACHINING, ON-THE SPOT MEASURING METHOD, AND LASER BEAM MACHINING APPARATUS

摘要

PPROBLEM TO BE SOLVED: To provide an on-the-spot measuring unit for laser beam machining capable of collecting more detailed and accurate information in the middle of laser beam machining, as well as two-dimensional strength information of a reaction field or a surface shape of a workpiece in the middle of laser beam machining, and also to provide an on-the-spot measuring method and a laser beam machining apparatus to which these unit and method are applied. PSOLUTION: In the laser beam machining apparatus which performs machining by irradiating a workpiece surface with a machining laser beam, there is provided a means for acquiring reaction field information, a means by which three-dimensional information or three- and two-dimensional information is obtained pertaining to the reaction field near the machining point on the workpiece surface when it is irradiated with the machining laser beam. PCOPYRIGHT: (C)2005,JPO&NCIPI