SILICON CARBIDE-SILICON DIOXIDE-CARBON COAXIAL NANO CABLE, ITS MANUFACTURING METHOD, SILICON CARBIDE NANO ROD, NANO CHAIN JOINED WITH CARBON NANO TUBE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a silicon carbide-silicon dioxide-carbon coaxial nano cable useful as a material for a microelectronics device; its simple manufacturing method; a silicon carbide nano rod; a nano chain joined with a carbon nano tube; and its simple manufacturing method.;SOLUTION: A mixture of silicon monoxide powder and iron powder is put in a boron nitride crucible, and this crucible is arranged in a heating furnace. After reducing pressure from the inside of this heating furnace, the silicon carbide-silicon dioxide-carbon coaxial nano cable is provided by heating at 1,450 °C to 1,650 °C while flowing methane gas. The silicon carbide nano rod and the nano chain joined with the carbon nano tube are provided by heating its silicon carbide-silicon dioxide-carbon coaxial nano cable at 1,500 °C to 1,800 °C in the pressure-reduced heating furnace.;COPYRIGHT: (C)2005,JPO&NCIPI