LOW-ENERGY TYPE ELECTRON BEAM IRRADIATION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a low-energy type electron beam irradiation device capable of realizing at low cost scale reduction of an electron beam shielding structure, improvement of a maintenance work environment, improvement of the degree of freedom of an arrangement design, or the like.;SOLUTION: This low-energy type electron beam irradiation device 1 is constituted so that an electron beam shielding member 41 for shielding the electron beam E generated from an electron beam generation part 34 is provided, enclosing the electron beam generation part 34 inside, and that a connection pipe 33 having an electrode rod 43 provided inside connects the electron beam generation part 34 to a power source part 32 through the electron beam shielding member 41. An electrode member support 45 penetrated by the electrode rod 43 is provided inside the connection pipe 33, and the support 45 supports the electrode rod 43 inside, and is supported by the connection pipe 33 on its peripheral part.;COPYRIGHT: (C)2005,JPO&NCIPI