PLACEMENT TABLE FOR LIQUID CRYSTAL GLASS SUBSTRATE, AND CLEANING APPARATUS FOR LIQUID CRYSTAL GLASS SUBSTRATE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To firmly fasten a substrate as well as suppress peeling electrostatic charge at the time of removing the substrate, and to prevent the coming-off of the substrate during cleaning even if a cleaning head which jointly uses gas injection is used.;SOLUTION: A supporting member 12 having suction ports 122 on the top face is formed as a continuous object. The top face of an inside region surrounded by the supporting member 12 is made lower than that of the supporting portion 12. In the inside region, a plurality of blowout ports 14 and a plurality of suction ports 13 are formed. The gas is blown out of the blowout ports 14 while at the same time being sucked by the suction ports 13. Due to this structure, the whole substrate 2 can be held at nearly the same level as the top face of the supporting member 12. Furthermore, by sucking the substrate 2 by the suction ports 122 of the supporting member 12, the periphery of the substrate 2 can be supported in a fixed state.;COPYRIGHT: (C)2005,JPO&NCIPI