NANO/MICRO MACHINE DESIGNING/MACHINING METHOD AND SYSTEM

摘要

PROBLEM TO BE SOLVED: To provide a nano/micro machine designing/machining method for shortening the development period and reducing the development cost of a nano/micro machine.;SOLUTION: The nano/micro machine designing/machining method is composed of process design, machining database, machining pattern formation and machining processes. The process from process design to machining pattern formation includes a reverse problem simulation process for obtaining a machining process and a machining pattern from designed device structure.;COPYRIGHT: (C)2005,JPO&NCIPI