POWER FEEDING METHOD FOR GLOW DISCHARGE, GLOW DISCHARGE EMISSION ANALYZER, AND POWER FEEDER

摘要

PROBLEM TO BE SOLVED: To secure stable power feed for the fluctuation of the impedance value of a sample by sputtering generated during analysis.;SOLUTION: A generator 12 of a glow discharge emission analyzer detects a power value Pf of high-frequency power Wf applied to a sample and a reflection power value Pr of reflection power Wr returning from a sample by a power measurement section 12b, and transmits the result to a control section 12c. The control section 12c computes the difference between the power value Pf and the reflection power value Pr, and determines whether the computed result is equal to a reference value. If the computed result is not equal to the reference value, an instruction for changing the power value Pf so that the computed value is equal to the reference value is outputted to the high-frequency power Wf.;COPYRIGHT: (C)2005,JPO&NCIPI