METHOD AND DEVICE FOR PRESS-FITTING SUBSTRATE AND JOINED SUBSTRATE PRODUCED WITH PRESS-FITTING

摘要

PPROBLEM TO BE SOLVED: To improve a production yield of a joined substrate, to heighten alignment accuracy between upper and lower substrates and besides to more certainly prevent seal path from occurring in pressing by dividing a large size substrate. PSOLUTION: In a method for press-fitting the substrates, a sheet of the lower substrate 1 is placed on a lower press plate 10 which is disposed on a surface plate 12. A sheet out of bisected parts of the upper substrate 2 is transferred to the upper side of the lower substrate 1 with a suction plate 33 of a second robot hand 31, is aligned with an optical system 34 for alignment and is superposed on the lower substrate 1. The upper substrate 2 is joined by sending down an upper press plate 11 and by being pressurized under heating. Subsequently the lower substrate 1 is transferred by one pitch, the other sheet of the upper substrate 2 is aligned toward the lower substrate 1 and is superposed thereon and the joined substrate 4 is obtained by heating and pressurizing the upper substrate 2 with the upper press plate 11. PCOPYRIGHT: (C)2005,JPO&NCIPI