TRANSFERRING METHOD, PEELING METHOD, AND PEELING DEVICE

摘要

PROBLEM TO BE SOLVED: To reduce the electrostatic breakdown of elements in a transferring method in which the elements are transferred to a transferred substrate by peeling the elements from an original substrate.;SOLUTION: The transferring method in which the elements 306 formed on the original substrate 300 are transferred to the transferred substrate 308 includes a laminating step of laminating the substrates 300 and 308 to each other by laminating the elements 306 to the substrate 308, an injecting step of injecting an ionized fluid into the interfaces between the elements 306 and substrate 300, and a transferring step of transferring the elements 306 to the substrate 308 by peeling the substrate 300 from the elements 306 at the interfaces into which the ionized fluid is injected.;COPYRIGHT: (C)2005,JPO&NCIPI