VAPOR DEPOSITION DEVICE, METHOD FOR RECOVERING AND REUSING VAPOR DEPOSITION MATERIAL, AND METHOD FOR MANUFACTURING ORGANIC ELECTROLUMINESCENT DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a vapor deposition device increasing recovery efficiency of an unused material while securing stability of vapor deposition for a long time, and also to provide a concrete means to refine a recovered organic material until it can be used again, as to a vapor deposition device to form a film by making the deposition material vaporized from a vapor deposition source under a decompressed atmosphere adhere to a substrate.;SOLUTION: This vapor deposition device is equipped with a shutter opening and closing to control the vapor deposition material made vaporized from a vapor deposition source reaching a substrate, and the shutter is formed by a plate-like substance provided with an opening part. The vapor deposition device is installed so that when forming a film, the vapor deposition material is made to reach the substrate from the vapor deposition source through the opening part, and when forming no film, the vapor deposition material is made to adhere to the shutter by covering the vapor deposition source with the plate-like substance to prevent the deposition material from reaching the substrate.;COPYRIGHT: (C)2005,JPO&NCIPI