首页> 外国专利> METHOD FOR CREATING CAM DATA FOR ELECTRONIC CIRCUIT BOARD, CAD/CAM SYSTEM FOR ELECTRONIC CIRCUIT BOARD, AND METHOD FOR PRODUCING ELECTRONIC CIRCUIT BOARD

METHOD FOR CREATING CAM DATA FOR ELECTRONIC CIRCUIT BOARD, CAD/CAM SYSTEM FOR ELECTRONIC CIRCUIT BOARD, AND METHOD FOR PRODUCING ELECTRONIC CIRCUIT BOARD

机译:用于创建电子电路板的CAM数据的方法,用于电子电路板的CAD / CAM系统以及用于生产电子电路板的方法

摘要

PROBLEM TO BE SOLVED: To provide a method for creating CAM data for an electronic circuit board by which CAD data which reflect the opening shape of a recognition mark for alignment in a solder resist layer can be appropriately and efficiently converted to CAM data of an exposure mask for photolithography for forming the openings.;SOLUTION: In order to form openings of a recognition mark for alignment of a substrate in a solder resist layer by a photolithography process using a photosensitive resin, the mask pattern of the recognition mark in a mask pattern for the openings is corrected so that the opening shape of the recognition mark reflected in CAD data has two segments which intersect each other in a concave shape on the opening side and that an etching margin for the segments becomes larger with the intersection of the segments as a correction reference point, as it becomes more distant from the correction reference point , and conversion as CAM data is performed.;COPYRIGHT: (C)2005,JPO&NCIPI
机译:解决的问题:提供一种用于创建电子电路板的CAM数据的方法,通过该方法,可以将反映用于阻焊层中对准的识别标记的开口形状的CAD数据适当且有效地转换为曝光的CAM数据。解决方案:为了通过光敏树脂通过光刻工艺在阻焊层中形成用于对准基板的对准标记的识别标记的开口,该识别标记的掩模图案为掩模图案校正开口的形状,使得在CAD数据中反映的识别标记的开口形状具有在开口侧以凹形彼此相交的两个片段,并且随着片段的交点,片段的蚀刻余量变大。校正参考点,因为它离校正参考点越来越远,并转换为CAM数据。;版权:(C)2 005,JPO&NCIPI

著录项

  • 公开/公告号JP2005241885A

    专利类型

  • 公开/公告日2005-09-08

    原文格式PDF

  • 申请/专利权人 NGK SPARK PLUG CO LTD;

    申请/专利号JP20040050460

  • 发明设计人 ONO TOMOSHIGE;YOKOI KENJI;OHASHI HATSUO;

    申请日2004-02-25

  • 分类号G03F1/08;C23F1/00;G06F17/50;H01L23/12;H05K3/00;

  • 国家 JP

  • 入库时间 2022-08-21 22:31:11

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