THERMAL TREATMENT METHOD OF ZINC OXIDE THIN FILM ON NON-OXIDE BOARD

摘要

PROBLEM TO BE SOLVED: To solve the problem wherein a zinc oxide thin film stops emitting ultraviolet rays, starts emitting a wide range of visible rays, and loses its intrinsic electrical properties when the zinc oxide thin film is compounded and then subjected to a thermal treatment, in a method of thermally treating the zinc oxide thin film on a non-oxide board.;SOLUTION: The zinc oxide thin film compounded on a silicon board keeps emitting only band edge light (875-380 nm) but hardly emits blue light or a visible light region even after it is subjected to a thermal treatment.;COPYRIGHT: (C)2005,JPO&NCIPI